SCIS brings together all stakeholders that are driving yield improvements through the very last frontier of component and hardware defect reduction.

• Subgroups

• Seals group

• Valves group

• RF group

• Gas Delivery group

• Dry Pumps group

• Chamber Components group

• Traceability & Verification

• Liquid Delivery Group

• Standards Committees & Task Forces

• Traceability

• Metrics

• Gases

• PIC

• SEMI Regions

• Americas

• SEMI Staff Person

• Mayura Padmanabhan